Fabrication of Nanostructures Using Electron Beam Lithography
Leuven | Just now
Electron beam lithography (EBL) is a powerful technique for fabricating nanoscale structures with exceptional accuracy, which are essential for applications in nanofluidics (for high resolution chemical analysis), single-molecule sensing (for genomics and proteomics research), and nanoelectronics (for different applications in artificial intelligence). During your stay at imec, you will design and fabricate advanced nanostructures, and apply your knowledge in a research-driven, hands-on environment. This internship will enhance your understanding of nanofabrication while contributing to the development of cutting-edge technologies.
Scope of Work:
Literature Review:
Study the latest techniques in nanopore and nanochannel fabrication.
Analyze the role of process parameters in determining accuracy and resolution.
Pattern Design:
Design patterns for nanochannels and nanopores using CAD tools and simulate patterning accuracy.
Fabrication and Process Optimization:
Prepare substrates, coat with appropriate resists, and provide samples for EBL exposure and development.
Apply reactive ion etching (RIE) for pattern transfer into the substrate.
Experiment with exposure dose, resist types, and etching parameters to refine the fabrication process.
Characterization:
Learn how to interpret data from SEM, AFM, and TEM to evaluate structural quality.
Expected Outcomes:
Fabrication of high-quality nanochannels and nanopores with precise geometry.
A deeper understanding of EBL and its use for nanostructure fabrication.
A detailed report summarizing findings, challenges, and process improvements.
Skills Required:
Background in materials science, nanotechnology, or a related field.
Familiarity with cleanroom environments and nanofabrication tools is an advantage.
Basic knowledge of SEM, AFM, and TEM techniques.
Skills to Be Developed:
Hands-on experience in nanostructure fabrication and optimization.
Proficiency in advanced characterization and data analysis.
The internship will be conducted in a dedicated nanofabrication laboratory under the guidance of experienced researchers, with access to advanced cleanroom facilities, and characterization tools.
Type of project: Internship
Duration: At least 6 months, with flexibility depending on project progress.
Required degree: Master of Science, Master of Engineering Science, Master of Bioengineering
Required background: Nanoscience & Nanotechnology, Bioscience Engineering
Supervising scientist(s): For further information or for application, please contact: Sanjin Marion (Sanjin.Marion@imec.be) and Alexey Podkovskiy (Alexey.Podkovskiy@imec.be)
Imec allowance will be provided for students studying at a non-Belgian university.