Fabrication and evaluation of enabling tip chips for nano-tomography applications

Breakthroughs in nanoelectronics device manufacturing are directly linked to disruptive innovations in the materials characterization domain. Scanning probe microscopy (SPM) is one of these enabling techniques which uses a nanoscopic sharp tip scanning across a sample surface while measuring a broad range of physical properties (e.g. topography, electrical,...) with unrivalled spatial resolution. Rapid tip blunting/degradation, limited measurement data quality and information depth are however fundamental limitations of traditional SPM. Therefore, imec has developed the so-called reverse tip sample (RTS) approach for electrical nano-tomography whereby the sample is scanned over a tip array which allows for seamless tip switching and enables new functionalities. The availability of high-performing tip array chips is crucial for the routine application of RTS SPM.
 
The goal of this internship is the development and evaluation of advanced tip array chips for RTS SPM. The student will design the required lithography masks, carry out the fabrication steps in the cleanroom using lithography, etching and deposition steps, and assess the performance of the fabricated probes by RTS SPM. 
 
For this topic, the student will work inside a cleanroom and lab environment to carry out the required experimental steps. They will characterize the fabricated tip sensors using SPM. The student will be part of imec’s materials and component and analysis group.

Type of Project: Combination of internship and thesis 

Master's degree: Master of Science; Master of Engineering Technology; Master of Engineering Science 

Master program: Electrotechnics/Electrical Engineering; Electromechanical engineering 

Duration: 6 months 

Supervisor: Claudia Fleischmann 

For more information or application, please contact Thomas Hantschel (thomas.hantschel@imec.be)

 Imec allowance will be provided.