Development of the MEMS accelerometer array system

Accelerometers are crucial as they enable a wide range of modern sensor and automation technologies. These small devices are integral for a variety of applications from smartphones and fitness trackers to automotive systems and industry. Moreover, MEMS accelerometers are essential in navigation systems enhancing precision and safety. Their versatility and impact on both everyday devices and advanced technologies underscore their importance in the modern era. Together with required miniaturization that comes along with the power and performance requirements, MEMS technology with its micrometer sized machines is an ideal candidate to solve some of the crucial problems for several applications. As autonomous systems evolve and become more advanced, the size and power consumption requirements are advancing dramatically. This project will focus on the use of MEMS accelerometer array configuration for emerging applications.  

This project aims to develop a demo of a redundant accelerometer array exceeding a standalone device performance. The innovation lies in applying sensor fusion directly to an on-chip array with individual readouts, unlike traditional methods that rely on arrays of devices with a common readout or sensor fusion across separate chips. By using the sensor fusion technologies a significant improvement in performance can be achieved with respect to the standalone MEMS sensor. This sensor fusion technology will enable a further miniaturization and lowering the cost of the highly performant acceleration sensing device. With new solutions explored in this internship, a significant improvement of such a system can be expected, opening new routes for a future of autonomous systems.

The goal of this project is to develop, design and optimize an innovative redundant MEMS accelerometer array system. This project will give an opportunity to perform a real-life system development and contribute to the realization of the next generation accelerometer system. Generally, this is a topic for students eager to understand complex electromechanical systems with a hands on attitude and interest for MEMS devices and data processing. High creativity is much appreciated. The work is estimated to be: 50% simulations/system design, 50% experimental implementation.

Type of Project: Thesis

Master's degree: Master of Engineering Technology; Master of Science

Duration: 6 months

Supervisor: Chris Van Hoof (EE, Nano)

For more information or application, please contact the supervising scientist Guilherme Brondani Torri (guilherme.brondanitorri@imec.be) and  Bogdan Vysotskyi (bogdan.vysotskyi@imec.be).

Only for self-supporting students.