CAMECA Further Develops APT Capabilities for Semiconductor Development with Improved Field of View Invizo 6000 Instrument

Madison, WI (July 19 2023) - CAMECA, a business unit of AMETEK, Inc., and a leading global provider of microanalytical instrumentation and metrology solutions is proud to announce the successful development and commercialization of the Invizo TM 6000.  Complementary to the LEAP 6000 XR with advanced automation, the Invizo offers unrivalled FOV due to the implementation of a patented electrostatic lens design and incorporates new features such as DUV dual beam laser, which provides unequalled specimen yield for complex structures.

The use of atom probe tomography (APT) is still relatively new in the integrated circuit industry.

To effectively assess the potential of APT and determine the proper workflow to incorporate its capabilities, researchers need access to advanced materials and processing facilities.

Over the past decades, advanced R&D centers and semiconductor companies have brought together new technology and researchers via Joint Evaluation Programs (JEP) and Joint Development Programs (JDP).

One such example to further develop and commercialize the Invizio is the recent JDP CAMECA has implemented with imec, recognized for developing the most advanced R&D for future logic, memory, and interconnected architectures with roadmaps extending to 2030 and beyond.

“We are very excited to be starting on this new partnership and expect to be making some major inroads into the application of APT in the semiconductor space” said Paul van der Heide, Department Director, Materials and Component Analysis at imec.

“This is an extraordinarily important partnership,” said Dr. David J. Larson, CAMECA Director of Marketing. “Not only for CAMECA and imec, but for microelectronics manufacturing worldwide. We are very excited to work with imec to shape future innovation in microelectronics and demonstrate benefits of accessing atomic level 3D characterization with APT of complex structures.”