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ICSiSTDM 2023
22 - 25 May 2023 | Como, Italy
International Conference on Silicon Epitaxy and Heterostructures International SiGe Technology and device meeting
imec
Wednesday May 24, 2023 (11:35 – 11:50) Talk by Roger Loo
Epitaxial SiGe/Si Multi-Layers for CFET Devices, Grown with a High Throughput Process
Thursday May 25, 2023 (08:30 – 08:55) Invited Talk by Yves Mol
Nano-Ridge Engineering – a Versatile Approach for Integration of III-V Devices on 300 mm Silicon
Thursday May 25, 2023 (09:10 – 09:25) Talk by Roger Loo
Ge-on-Nothing as an alternative template to thin Ge wafers
Event Details
The Joint ISTDM-ICSI conference will cover topical issues in the area of group IV materials and technology research and application.
MATERIALS
- Group IV semiconductors: Si, Ge, C, Sn, Pb and their alloys
- Monolithic and hybrid integration of III-V semiconductors on Si: GaN, InSb, GaAs, GaAs, InGaAs
- 2D materials: graphene, 2D transition metal dichalcogenides, germanene, silicene, stanine, black phosphorous
- Semiconductor-superconductor integration
- Isotopically purified materials and heterostructures
TECHNOLOGY
- Strain-tuning platforms: relaxed buffers, silicon nitride, suspended microstructures
- Advanced thermal processing: ultra-high doping/activation; spike & soak, ms-anneal (flash, laser), ns-anneal (melt, sub-melt), microwave-anneal
- Interfaces: high-K, metal contacts, electrical properties and characterization, surface passivation, high quality oxides, e.g. ISSG (in-situ steam generation) and RPO (remote plasma oxidation)
- Epitaxy equipment technology & metrology challenges
APPLICATIONS
- Micro- nano-electronics: hybrid FinFETs
- Infrared photodetectors including avalanche photodiodes and single photon detectors
- Mid-infrared photonics: quantum cascade lasers, waveguides, and quantum well photodetectors
- Group IV and hybrid laser sources
- Quantum technologies: 2D electron and hole gas quantum dots, single donor quantum dots, superconducting quantum dots, nuclear spin qubits
- Emerging technologies: neuromorphic devices, plasmonics and spin manipulation